膜技術在電子純水中的應用
純(chun)(chun)水(shui)(shui)在電(dian)子工業主要(yao)(yao)是電(dian)子元(yuan)(yuan)器(qi)(qi)件(jian)生(sheng)(sheng)產(chan)(chan)中的重要(yao)(yao)作用(yong)(yong)日(ri)益突(tu)出,純(chun)(chun)水(shui)(shui)水(shui)(shui)質已成(cheng)為影響電(dian)子元(yuan)(yuan)器(qi)(qi)件(jian)產(chan)(chan)品質量、生(sheng)(sheng)產(chan)(chan)成(cheng)品率及(ji)生(sheng)(sheng)產(chan)(chan)成(cheng)本的重要(yao)(yao)因素之一,水(shui)(shui)質要(yao)(yao)求也越來越高。在電(dian)子元(yuan)(yuan)器(qi)(qi)件(jian)生(sheng)(sheng)產(chan)(chan)中,高純(chun)(chun)水(shui)(shui)主要(yao)(yao)用(yong)(yong)作清洗用(yong)(yong)水(shui)(shui)及(ji)用(yong)(yong)來配制各種溶液、漿料,不(bu)同的電(dian)子元(yuan)(yuan)器(qi)(qi)件(jian)生(sheng)(sheng)產(chan)(chan)中純(chun)(chun)水(shui)(shui)的用(yong)(yong)途(tu)及(ji)對(dui)水(shui)(shui)質的要(yao)(yao)求也不(bu)同。
在(zai)電(dian)器電(dian)容器生(sheng)(sheng)產(chan)中(zhong)(zhong),鋁箔及(ji)工(gong)(gong)(gong)作件的(de)(de)(de)清洗(xi)需(xu)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui),如水(shui)中(zhong)(zhong)含(han)有(you)氯離(li)子,電(dian)容器就(jiu)會(hui)漏電(dian)。在(zai)電(dian)子管(guan)生(sheng)(sheng)產(chan)中(zhong)(zhong),電(dian)子管(guan)陰極(ji)涂甫碳酸鹽,如其(qi)中(zhong)(zhong)混入(ru)雜質,就(jiu)會(hui)影(ying)響電(dian)子的(de)(de)(de)發(fa)射,進(jin)而影(ying)響電(dian)子管(guan)的(de)(de)(de)放大性能及(ji)壽命(ming),因此其(qi)配液(ye)(ye)要使(shi)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui),在(zai)顯象管(guan)和(he)陰極(ji)射線管(guan)生(sheng)(sheng)產(chan)中(zhong)(zhong),其(qi)熒光(guang)屏內壁(bi)用(yong)(yong)(yong)(yong)噴涂法(fa)或(huo)(huo)沉(chen)淀法(fa)附(fu)著一層熒光(guang)物質,是鋅(xin)或(huo)(huo)其(qi)他金(jin)屬的(de)(de)(de)硫(liu)化物組成的(de)(de)(de)熒光(guang)粉顆粒并(bing)(bing)用(yong)(yong)(yong)(yong)硅(gui)酸鉀粘(zhan)合而成,其(qi)配制需(xu)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui),如純(chun)(chun)(chun)(chun)水(shui)中(zhong)(zhong)含(han)銅(tong)在(zai)8ppb以上,就(jiu)會(hui)引(yin)起發(fa)光(guang)變色(se)(se);含(han)鐵在(zai)50ppb以上就(jiu)會(hui)使(shi)發(fa)光(guang)變色(se)(se)、變暗(an)、閃光(guang)跳躍(yue);含(han)奇有(you)機物膠體(ti)、微(wei)粒、細菌等(deng)(deng),就(jiu)會(hui)降(jiang)低熒光(guang)層強度(du)及(ji)其(qi)與(yu)玻殼(ke)的(de)(de)(de)粘(zhan)附(fu)力,并(bing)(bing)會(hui)造成氣泡、條(tiao)跡、漏光(guang)點等(deng)(deng)廢次品。在(zai)黑(hei)白顯象管(guan)熒光(guang)屏生(sheng)(sheng)產(chan)的(de)(de)(de)12個工(gong)(gong)(gong)序中(zhong)(zhong),玻殼(ke)清洗(xi)、沉(chen)淀、濕潤(run)、洗(xi)膜、管(guan)頸清洗(xi)等(deng)(deng)5個工(gong)(gong)(gong)序需(xu)使(shi)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui),每(mei)生(sheng)(sheng)產(chan)一個晶體(ti)管(guan)需(xu)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui)80kg。液(ye)(ye)晶顯示器的(de)(de)(de)屏面需(xu)有(you)純(chun)(chun)(chun)(chun)水(shui)清洗(xi)和(he)用(yong)(yong)(yong)(yong)純(chun)(chun)(chun)(chun)水(shui)配液(ye)(ye),如純(chun)(chun)(chun)(chun)水(shui)中(zhong)(zhong)存在(zai)著金(jin)屬離(li)子、微(wei)生(sheng)(sheng)物、微(wei)粒等(deng)(deng)雜質,就(jiu)會(hui)使(shi)液(ye)(ye)晶顯示電(dian)路發(fa)生(sheng)(sheng)故障,影(ying)響液(ye)(ye)晶屏質量,導致廢、次品。
純水(shui)制造中應用(yong)的膜(mo)技術主(zhu)要(yao)有(you)電滲析(ED)、反滲透(RO)、納濾(lv)(NF)、超濾(lv)(UF)、微濾(lv)(MF)。
與傳(chuan)統的(de)(de)水(shui)(shui)(shui)處(chu)理(li)(li)技術相比(bi),膜(mo)技術具(ju)有工藝簡單、操(cao)作方便、易于自(zi)動(dong)控(kong)制、能耗小、無污(wu)染、去除(chu)雜質(zhi)效率高、運行(xing)成本低等(deng)(deng)優(you)點,特別(bie)是幾種膜(mo)技術的(de)(de)配合使用,再(zai)輔之(zhi)經(jing)其他水(shui)(shui)(shui)處(chu)理(li)(li)工藝,如(ru)石英(ying)砂、活性(xing)炭吸附(fu)、脫(tuo)氣、離(li)子(zi)交換、UV殺菌等(deng)(deng),為去除(chu)水(shui)(shui)(shui)中的(de)(de)各種雜質(zhi),滿足日益發展的(de)(de)電(dian)(dian)子(zi)工業對(dui)高純水(shui)(shui)(shui)的(de)(de)需要,提供了(le)有效而(er)可靠的(de)(de)手段,而(er)且也只有應用了(le)多種膜(mo)技術,才能生產出合格、穩定的(de)(de)高純水(shui)(shui)(shui),才能生產出大規(gui)(gui)模、超(chao)大規(gui)(gui)模、甚大規(gui)(gui)模集成電(dian)(dian)路(LSI、VLSI、ULSI),從(cong)而(er)使計算機、雷達、通訊、自(zi)動(dong)控(kong)制等(deng)(deng)現(xian)代電(dian)(dian)子(zi)工業的(de)(de)發展和應用得以實現(xian)。
微濾(lv)(lv)系(xi)統可分為三類(lei),第(di)一(yi)類(lei)為前級UF、RO前的保安過濾(lv)(lv)器,用(yong)于支除(chu)(chu)水(shui)中(zhong)的的懸濁物(wu)微粒,降低水(shui)中(zhong)的SDI值,濾(lv)(lv)芯(xin)為PP(聚(ju)丙烯)膜(mo)摺迭(die)式濾(lv)(lv)芯(xin),孔徑為5μm或(huo)3μm。第(di)二(er)類(lei)在離子交換后(hou),用(yong)于濾(lv)(lv)除(chu)(chu)離子交換樹脂碎片,濾(lv)(lv)芯(xin)為PP膜(mo)摺迭(die)式濾(lv)(lv)芯(xin),孔徑為1μm。第(di)三類(lei)在UV殺(sha)菌器后(hou),用(yong)于濾(lv)(lv)除(chu)(chu)微生(sheng)物(wu)尸體,濾(lv)(lv)芯(xin)為N-6(尼龍(long)6)膜(mo)摺迭(die)式濾(lv)(lv)芯(xin),孔徑為0.45μm或(huo)0.2μm。以上濾(lv)(lv)芯(xin)均(jun)為核工(gong)業部第(di)八研(yan)究所生(sheng)產。

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